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[IEEE 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Vancouver, BC, Canada (2020.1.18-2020.1.22)] 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - A High-$Q$ 30nm-Thick MFM Resonator Using Ferroelectric Hafnium Zirconium Oxide
Ghatge, Mayur, Walters, Glen, Nishida, Toshikazu, Tabrizian, RoozbehYear:
2020
DOI:
10.1109/MEMS46641.2020.9056212
File:
PDF, 5.80 MB
2020