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Switching Dynamics Measurement of Ferroelectric Y-Doped HfO 2 M-I-M Capacitor
Lin, YuWei, Mizutani, Kazuto, Hoshii, Takuya, Wakabayashi, Hitoshi, Tsutsui, Kazuo, Kakushima, KuniyukiVolume:
97
Journal:
ECS Transactions
DOI:
10.1149/09703.0039ecst
Date:
May, 2020
File:
PDF, 1.13 MB
2020