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Surface processes in low-pressure capacitive radio frequency discharges driven by tailored voltage waveforms
Derzsi, Aranka, Horváth, Benedek, Donko, Zoltan, Schulze, JulianJournal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/ab9156
Date:
May, 2020
File:
PDF, 6.82 MB
2020