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Effect of Bipolar Charging of SiH4 on the Growth Rate and Crystallinity of Silicon Films Grown in the Atmospheric Pressure Chemical Vapor Deposition Process
Lee, Yoonjung, Han, Heung Nam, Kim, Woongsik, Hwang, Nong MoonJournal:
Electronic Materials Letters
DOI:
10.1007/s13391-020-00217-0
Date:
April, 2020
File:
PDF, 2.44 MB
2020