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Development of Piezo-element Sensor for Touch Trigger Probe.
ISHIKAWA, Nobuhiro, HIDAKA, Kazuhiko, NISHIMURA, KunitoshiVolume:
66
Year:
2000
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.66.304
File:
PDF, 448 KB
2000