Development of a Soft UV-NIL Step&Repeat and Lift-Off...

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Nanotechnology 2020 / 05

Development of a Soft UV-NIL Step&Repeat and Lift-Off Process Chain for High Speed Metal Nanomesh Fabrication

Haslinger, Michael Johannes, Mitteramskogler, Tina, Kopp, Sonja, Leichtfried, Hans, Messerschmidt, Martin, Thesen, Manuel, Mühlberger, Michael
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Journal:
Nanotechnology
DOI:
10.1088/1361-6528/ab9130
Date:
May, 2020
File:
PDF, 1.44 MB
2020
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