Thermal degradation behavior of self-assembled monolayer...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2020 / 05 Vol. 38; Iss. 3

Thermal degradation behavior of self-assembled monolayer surfactant on silicon substrate

Li, Mingjie, Huang, Xinglong, Luo, Wenxin, Chen, Yulong, Han, Fei, Cheng, Xing
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Volume:
38
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5143307
Date:
May, 2020
File:
PDF, 2.90 MB
2020
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