Improvement of Etching Anisotropy in Fused Silica by...

Micromachines 2020 / 05 Vol. 11; Iss. 5

Improvement of Etching Anisotropy in Fused Silica by Double-Pulse Fabrication

Stankevič, Valdemar, Karosas, Jonas, Račiukaitis, Gediminas, Gečys, Paulius
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Volume:
11
Journal:
Micromachines
DOI:
10.3390/mi11050483
Date:
May, 2020
File:
PDF, 6.43 MB
2020
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