Method for determination of resists parameters for photonic...

EPJ Web of Conferences 2019 Vol. 220

Method for determination of resists parameters for photonic - integrated circuits e-beam lithography on silicon nitride platform

Elmanov, Ilia, Elmanova, Anna, Komrakova, Sophia, Golikov, Alexander, Kaurova, Natalya, Kovalyuk, Vadim, Goltsman, Gregory, Arakelyan, S., Evlyukhin, A., Kalachev, A., Naumov, A.
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Volume:
220
Year:
2019
Journal:
EPJ Web of Conferences
DOI:
10.1051/epjconf/201922003012
File:
PDF, 276 KB
2019
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