High-energy ion (He+, Si++, Ga+, Au++) interactions with...

  • Main
  • 2020 / 04
  • High-energy ion (He+, Si++, Ga+, Au++) interactions with...
Nanotechnology 2020 / 04

High-energy ion (He+, Si++, Ga+, Au++) interactions with PMMA in ion beam lithography

Zhang, Lei, Thomas, Joseph P., Guan, Xiaoyi, Heinig, Nina F, Leung, Kam Tong
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Journal:
Nanotechnology
DOI:
10.1088/1361-6528/ab8d69
Date:
April, 2020
File:
PDF, 502 KB
2020
Conversion to is in progress
Conversion to is failed