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Nano-patterning of a monolayer molybdenum disulfide with sub-nanometer helium ion beam: considering its shape, size and damage
Deng, Yunsheng, Wang, Gang, Qiu, Yang, He, Dongsheng, Lin, Junhao, He, JiaqingJournal:
Nanotechnology
DOI:
10.1088/1361-6528/ab90b5
Date:
May, 2020
File:
PDF, 1.33 MB
2020