Providing of Ultra-Thin Film Thickness Uniformity by...

IOP Conference Series Materials Science and Engineering 2020 / 05 Vol. 781

Providing of Ultra-Thin Film Thickness Uniformity by Magnetron Sputtering from Two Sources

Hydyrova, S, Akishin, M Yu, Vasilev, D D, Moiseev, K M
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Volume:
781
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/781/1/012012
Date:
May, 2020
File:
PDF, 1.38 MB
2020
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