![](/img/cover-not-exists.png)
Providing of Ultra-Thin Film Thickness Uniformity by Magnetron Sputtering from Two Sources
Hydyrova, S, Akishin, M Yu, Vasilev, D D, Moiseev, K MVolume:
781
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/781/1/012012
Date:
May, 2020
File:
PDF, 1.38 MB
2020