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Control of phase purity in high scandium fraction heteroepitaxial ScAlN grown by molecular beam epitaxy
Hardy, Matthew T., Jin, Eric N., Nepal, Neeraj, Katzer, D. Scott, Downey, Brian P., Gokhale, Vikrant J., Storm, David F., Meyer, David J.Volume:
13
Journal:
Applied Physics Express
DOI:
10.35848/1882-0786/ab916a
Date:
June, 2020
File:
PDF, 1.37 MB
2020