On-Wafer FinFET-Based EUV/eBeam Detector Arrays for Advanced Lithography Processes
Wang, Chien-Ping, Tsai, Yi-Pei, Lin, Burn Jeng, Liang, Zheng-Yong, Chiu, Po-Wen, Shih, Jiaw-Ren, Lin, Chrong Jung, King, Ya-ChinVolume:
67
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2020.2987442
Date:
June, 2020
File:
PDF, 2.45 MB
2020