Atomic layer deposition of cobalt phosphate from...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2020 / 03 Vol. 38; Iss. 2

Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O 2 plasma

Di Palma, Valerio, Knoops, Harm C. M., Kessels, Wilhelmus M. M. (Erwin), Creatore, Mariadriana
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Volume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5143896
Date:
March, 2020
File:
PDF, 3.04 MB
2020
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