Electrical characterization of silicon nitride...

Journal of Materials Science: Materials in Electronics 2020 / 5

Electrical characterization of silicon nitride interlayer-based MIS diode

Buyukbas-Ulusan, A., Tataroglu, A.
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Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-020-03533-1
Date:
May, 2020
File:
PDF, 1.07 MB
2020
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