Study on the polishing mechanism of pH-dependent...

Tribology International 2020 / 10 Vol. 150

Study on the polishing mechanism of pH-dependent tribochemical removal in CMP of CaF2 crystal

Guo, Jie, Gong, Jian, Shi, Pengfei, Xiao, Chen, Jiang, Liang, Chen, Lei, Qian, Linmao
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Volume:
150
Journal:
Tribology International
DOI:
10.1016/j.triboint.2020.106370
Date:
October, 2020
File:
PDF, 1.98 MB
2020
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