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Reaction mechanism of the Me 3 AuPMe 3 âH 2 plasma-enhanced ALD process
Van Daele, Michiel, Griffiths, Matthew B. E., Minjauw, Matthias M., Barry, Seán T., Detavernier, Christophe, Dendooven, JolienYear:
2020
Journal:
Physical Chemistry Chemical Physics
DOI:
10.1039/C9CP06855D
File:
PDF, 2.42 MB
2020