Synthesis of AlO x...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2020 / 05 Vol. 38; Iss. 3

Synthesis of AlO x thin films by atmospheric-pressure mist chemical vapor deposition for surface passivation and electrical insulator layers

Rajib, Arifuzzaman, Enamul, Karim Md, Kurosu, Shunji, Ukai, Tomofumi, Tokuda, Masahide, Fujii, Yasuhiko, Hanajiri, Tatsuro, Ishikawa, Ryo, Ueno, Keiji, Shirai, Hajime
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Volume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5143273
Date:
May, 2020
File:
PDF, 4.87 MB
2020
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