Gate oxide punching thru mechanism in plasma dry etching
QingZhao Zhang, ChangQing Xie, Ming Liu, Bing Li, BaoQin Chen, XiaoLi ZhuVolume:
51
Language:
english
Pages:
5
DOI:
10.1007/s11431-008-0134-5
Date:
November, 2008
File:
PDF, 966 KB
english, 2008