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Fabrication of metal suspending nanostructures by nanoimprint lithography (NIL) and isotropic reactive ion etching (RIE)
GuoYong Xie, Jin Zhang, YongYi Zhang, YingYing Zhang, Tao Zhu, ZhongFan LiuVolume:
52
Language:
english
Pages:
6
DOI:
10.1007/s11431-008-0290-7
Date:
May, 2009
File:
PDF, 1.12 MB
english, 2009