A high-SPL piezoelectric MEMS loud speaker based on thin...

Sensors and Actuators A: Physical 2020 / 07 Vol. 309

A high-SPL piezoelectric MEMS loud speaker based on thin ceramic PZT

Wang, Haoran, Chen, Zhenfang, Xie, Huikai
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Volume:
309
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2020.112018
Date:
July, 2020
File:
PDF, 3.61 MB
2020
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