Progress of nanopositioning and nanomeasuring machines for...

Measurement Science and Technology 2020 / 08 Vol. 31; Iss. 8

Progress of nanopositioning and nanomeasuring machines for cross-scale measurement with sub-nanometre precision

Manske, E, Fröhlich, T, Füßl, R, Ortlepp, I, Mastylo, R, Blumröder, U, Dontsov, D, Kühnel, M, Köchert, P
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Volume:
31
Journal:
Measurement Science and Technology
DOI:
10.1088/1361-6501/ab848c
Date:
August, 2020
File:
PDF, 1.90 MB
2020
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