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Thermal stability of nanocrystalline W-Ti diffusion barrier thin films
QingXiang Wang, ZhiKang Fan, ShuHua LiangVolume:
53
Language:
english
Pages:
7
DOI:
10.1007/s11431-009-0402-z
Date:
April, 2010
File:
PDF, 832 KB
english, 2010