Communication—Effect of Hydrogen Water on Ceria Abrasive...

ECS Journal of Solid State Science and Technology 2020 / 05 Vol. 9; Iss. 4

Communication—Effect of Hydrogen Water on Ceria Abrasive Removal in Post-CMP Cleaning

Hong, Seokjun, Park, Sang-Hyeon, Kanade, Chaitanya, Lee, Jaewon, Liu, Pengzhan, Lee, Inkoo, Seok, Hyunho, Kim, Taesung
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Volume:
9
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2162-8777/ab902c
Date:
May, 2020
File:
PDF, 969 KB
2020
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