Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21
2013 Vol. 2013.7
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B032 Development of fixed diamond abrasive pellet for final finishing of mono-crystallined sapphire wafers
TASHIRO, Yoshiaki, ZHOU, Libo, SHIMIZU, Jun, SHINODA, Noriaki, MITSUI, YoshinoriVolume:
2013.7
Year:
2013
Journal:
Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21
DOI:
10.1299/jsmelem.2013.7.298
File:
PDF, 1.52 MB
2013