Characterization of Polysiloxane Modified Polysilsesquioxane Films for Low Dielectric Applications: Microstructure, Electrical Properties and Mechanical Properties
Hyeon-Lee, Jingyu, Lyu, Yi Yeol, Mah, Sang Kook, Yim, Jin-Hyeong, Jeong, Hyun-Dam, Lee, Mong Sup, Kim, Sang YoulVolume:
716
Year:
2002
Journal:
MRS Proceedings
DOI:
10.1557/PROC-716-B7.15
File:
PDF, 227 KB
2002