Development of magnetically driven microvalve using...

International Journal of Applied Electromagnetics and Mechanics 2016 / 12 Vol. 52; Iss. 3-4

Development of magnetically driven microvalve using photosensitive SU-8/Fe composite

Suzuki, Junya, Terao, Kyohei, Takao, Hidekuni, Shimokawa, Fusao, Oohira, Fumikazu, Miyagawa, Hayato, Suzuki, Takaaki, Kojima, Fumio, Kobayashi, Futoshi, Nakamoto, Hiroyuki
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Volume:
52
Journal:
International Journal of Applied Electromagnetics and Mechanics
DOI:
10.3233/JAE-162186
Date:
December, 2016
File:
PDF, 794 KB
2016
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