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Gas-Phase Chemical Reaction Mechanism in the Growth of AlN during High-Temperature MOCVD: A Thermodynamic Study
An, Jiadai, Dai, Xianying, Zhang, Qian, Guo, Runqiu, Feng, LanshengVolume:
5
Journal:
ACS Omega
DOI:
10.1021/acsomega.0c01180
Date:
May, 2020
File:
PDF, 2.41 MB
2020