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Metalorganic chemical vapor phase deposition of AlScN/GaN heterostructures
Ligl, Jana, Leone, Stefano, Manz, Christian, Kirste, Lutz, Doering, Philipp, Fuchs, Theodor, Prescher, Mario, Ambacher, OliverVolume:
127
Journal:
Journal of Applied Physics
DOI:
10.1063/5.0003095
Date:
May, 2020
File:
PDF, 3.54 MB
2020