Frequency characteristics and thermal compensation of MEMS...

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Journal of Micromechanics and Microengineering 2020 / 05

Frequency characteristics and thermal compensation of MEMS devices based on geometric anti-spring

Zhang, Hongcai, Wei, Xueyong, Gao, Yang, Cretu, Edmond
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Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/ab9203
Date:
May, 2020
File:
PDF, 4.09 MB
2020
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