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Influence of Annealing Condition on Threading Dislocation Density of Ge Grown by RPCVD
Yamamoto, Yuji, Zaumseil, Peter, Shubert, Markus Andreas, Tillack, BerndVolume:
93
Journal:
ECS Transactions
DOI:
10.1149/09301.0087ecst
Date:
October, 2019
File:
PDF, 337 KB
2019