Design of a Tri-Axial Surface Micromachined MEMS Vibrating Gyroscope
Crescenzi, Rocco, Castellito, Giuseppe Vincenzo, Quaranta, Simone, Balucani, MarcoVolume:
20
Journal:
Sensors
DOI:
10.3390/s20102822
Date:
May, 2020
File:
PDF, 11.91 MB
2020