Selective Electrodeposition Technology for Organic...

IEEJ Transactions on Sensors and Micromachines 2006 Vol. 126; Iss. 1

Selective Electrodeposition Technology for Organic Insulator Films on Microelectromechanical-System Structures

Sakata, Tomomi, Ishii, Hiromu, Okabe, Yuichi, Sato, Norio, Nagase, Masao, Kamei, Toshikazu, Kudou, Kazuhisa, Yano, Masaki, Machida, Katsuyuki
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Volume:
126
Year:
2006
Journal:
IEEJ Transactions on Sensors and Micromachines
DOI:
10.1541/ieejsmas.126.14
File:
PDF, 7.08 MB
2006
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