Surface pretreatment and deposition temperature dependence...

Journal of Crystal Growth 2020 / 04 Vol. 536

Surface pretreatment and deposition temperature dependence of MgO epitaxy on GaN by thermal atomic layer deposition

Goodrich, Justin C., Farinha, Thomas G., Ju, Ling, Howzen, Alexandra J., Kundu, Animesh, Ogidi-Ekoko, Onoriode N., Wierer, Jonathan J., Tansu, Nelson, Strandwitz, Nicholas C.
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Volume:
536
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2020.125568
Date:
April, 2020
File:
PDF, 1.33 MB
2020
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