Effects of the doping level in the production of silicon...

Materials Science in Semiconductor Processing 2020 / 11 Vol. 118

Effects of the doping level in the production of silicon nanowalls by metal assisted chemical etching

Aca-López, Viridiana, Quiroga-González, Enrique, Gómez-Barojas, Estela, Światowska, Jolanta, Luna-López, J. Alberto
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Volume:
118
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2020.105206
Date:
November, 2020
File:
PDF, 1.74 MB
2020
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