A Benchmark Study of Complementary-Field Effect Transistor (CFET) Process Integration Options done by Virtual Fabrication
Vincent, B., Boemmels, J., Ryckaert, J., Ervin, J.Year:
2020
Journal:
IEEE Journal of the Electron Devices Society
DOI:
10.1109/JEDS.2020.2990718
File:
PDF, 644 KB
2020