A Deep Convolutional Neural Network for Wafer Defect...

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IEEE Transactions on Semiconductor Manufacturing 2020

A Deep Convolutional Neural Network for Wafer Defect Identification on an Imbalanced Dataset in Semiconductor Manufacturing Processes

Saqlain, Muhammad, Abbas, Qasim, Lee, Jong Yun
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Year:
2020
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2020.2994357
File:
PDF, 821 KB
2020
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