Explanation of the apparent depth resolution improvement by...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2020 / 05 Vol. 38; Iss. 3

Explanation of the apparent depth resolution improvement by SIMS using cluster ion detection

Hofmann, Siegfried, Lejcek, Pavel, Zhou, Gang, Yang, Hao, Lian, SongYou, Kovac, Janez, Wang, JiangYong
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
38
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/6.0000108
Date:
May, 2020
File:
PDF, 1.48 MB
2020
Conversion to is in progress
Conversion to is failed