Laser Micromilling Technology as a Key for Rapid Ceramic...

Physics of Atomic Nuclei 2019 / 12 Vol. 82; Iss. 11

Laser Micromilling Technology as a Key for Rapid Ceramic MEMS Devices

Oblov, K. Yu., Samotaev, N. N., Etrekova, M. O., Gorshkova, A. V.
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Volume:
82
Journal:
Physics of Atomic Nuclei
DOI:
10.1134/S1063778819110152
Date:
December, 2019
File:
PDF, 660 KB
2019
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