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High Sensitive Tilt Sensor for Quartz Micromachining
Kohsaka, Fusao, Liang, Jinxing, Matsuo, Takahiro, Ueda, ToshitsuguVolume:
127
Year:
2007
Journal:
IEEJ Transactions on Sensors and Micromachines
DOI:
10.1541/ieejsmas.127.431
File:
PDF, 1.02 MB
2007