Experimental optimization of post metal annealing on fully...

Japanese Journal of Applied Physics 2020 / 07 Vol. 59; Iss. SM

Experimental optimization of post metal annealing on fully depleted-silicon on insulator tunneling field effect transistor

Song, Hyun-Dong, Song, Hyeong-Sub, Eadi, Sunil Babu, Choi, Hyun-Woong, Shin, Hyun-Jin, Lee, Jea Woo, Yang, Ji-Woon, Lee, Hi-Deok
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Volume:
59
Journal:
Japanese Journal of Applied Physics
DOI:
10.35848/1347-4065/ab8e1c
Date:
July, 2020
File:
PDF, 1.66 MB
2020
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