![](/img/cover-not-exists.png)
Application of atmospheric pressure plasma polishing method in machining of silicon ultra-smooth surfaces
Jufan Zhang, Bo Wang, Shen DongVolume:
3
Language:
english
Pages:
8
DOI:
10.1007/s11460-008-0072-9
Date:
December, 2008
File:
PDF, 1.70 MB
english, 2008