ChemInform Abstract: TRIMETHYLSTIBINE AS A SOURCE OF SB FOR DOPING EPITAXIAL SI LAYERS
MANASEVIT, H. M., SIMPSON, W. I., ERDMANN, F. M.Volume:
5
Journal:
Chemischer Informationsdienst
DOI:
10.1002/chin.197440062
Date:
October, 1974
File:
PDF, 107 KB
1974