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Effects of AZO film as inductive layer and annealing temperature on microstructure crystallinity and electrical and optical properties of IGZO/SiO2 and IGZO/AZO/SiO2 specimens
Chang, Chang-Shuo, Chen, You-He, Han, Chang-Fu, Lin, Jen-FinVolume:
46
Journal:
Ceramics International
DOI:
10.1016/j.ceramint.2020.01.129
Date:
June, 2020
File:
PDF, 8.33 MB
2020