Microscopic modeling and optimal operation of plasma enhanced atomic layer deposition
Ding, Yangyao, Zhang, Yichi, Orkoulas, Gerassimos, Christofides, Panagiotis D.Journal:
Chemical Engineering Research and Design
DOI:
10.1016/j.cherd.2020.05.014
Date:
May, 2020
File:
PDF, 5.94 MB
2020