Molecular dynamics simulation of nano-polishing of single...

Materials Science in Semiconductor Processing 2020 / 11 Vol. 118

Molecular dynamics simulation of nano-polishing of single crystal silicon on non-continuous surface

Wang, Guilian, Feng, Zhijian, Zheng, Qingchun, Li, Bin, Zhou, Haibo
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Volume:
118
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2020.105168
Date:
November, 2020
File:
PDF, 4.38 MB
2020
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