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An experimental investigation of Pulsed Laser Deposition of ferroelectric Gd:HfO2 in a CMOS BEOL compatible process
Cavalieri, Matteo, O'Connor, Eamon, Gastaldi, Carlotta, Stolichnov, Igor, Ionescu, Adrian M.Journal:
ACS Applied Electronic Materials
DOI:
10.1021/acsaelm.0c00319
Date:
May, 2020
File:
PDF, 1.65 MB
2020