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Growth of AlN on sapphire: Predicting the optimal nucleation density by surface kinetics modeling
Rathkanthiwar, Shashwat, Kalra, Anisha, Muralidharan, Rangarajan, Nath, Digbijoy N., Raghavan, SrinivasanVolume:
127
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5127193
Date:
May, 2020
File:
PDF, 6.81 MB
2020