Analysis of dynamic behavior for V-shaped electrothermal...

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Journal of Micromechanics and Microengineering 2020 / 05

Analysis of dynamic behavior for V-shaped electrothermal microactuator

Chen, Hao, Wang, Xin-jie, Wang, Jiong, Xi, Zhan-wen
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Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/ab90cc
Date:
May, 2020
File:
PDF, 1.78 MB
2020
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